CATHODE REBUILDS

Certain cathode types are very expensive to purchase. Some e-beam lithography systems use a full Vogel mount cathode with a very complicated structure. Some Auger systems require the cathode and grid cap be assembled with very high precision using specialized equipment. As a service to our customers, Applied Physics Technologies refurbishes used cathodes of these types as a lower cost option than purchasing a brand-new cathode.

 Standard Rebuilds

Please contact us for a return merchandise authorization (RMA) number before returning the core to APTech for our rebuilding services. Depending on the type of rebuild, the lead time can range from 7-12 business days once the core arrives at our facility. This does not include shipping time.

ElectroScan/Philips

ETEC

JEOL

LEO/Zeiss

Manufacturer

Systems

LaB6 P/N

General Rebuild Upgrade

PHI

SEM, TEM, Lithography, Mircoprobe, etc.

CeBix P/N

Lithography

Lithography

2020 Environmental SEM

XL Environmental SEM

JBX-5D Lithography

JBX-5DII Lithography

JAMP10, JVM Auger Microprobe

SEM

TEM

590 Auger Microprobe

595, 600, 650 & 660 Auger Microprobe

610 Auger Microprobe

4300 Auger Microprobe

PHI Upgrade for ridge removal

95939

95941

95940

80101

97224

97225

80102

80103

15615

14017

11802

15853

15852

15851

16141

18722

16494

18723

47800

47800

11817

15854

11826

15856

12854

15059

11827

15857

15065

11827

*We offer rebuilding services on many more systems and custom rebuilding. Please contact us for more information.

Upgrades

APTech currently offers an upgrade for all rebuilds. The majority of our customers choose to add the rebuild upgrade on to their order. With the basic rebuild, we clean all of the parts, but it is not an in-depth cleaning. With the upgrade, at least 1-2 hours are spent cleaning each of the parts. We also polish the inside of the grid cap using a very fine stone, followed by a polishing compound. The most common problem with grid caps is the arcing that can occur between the sides and crystal, leading to premature failure of the cathode. This upgrade will remove ridges, reducing the chances arcing will occur, and giving all of the cathode components a very comprehensive cleaning. Again, this is only an upgrade and is not required, but all of our OEMs and about 95% of our end users choose to purchase the upgrade.

Cathode Rebuilds

The used cathode or Wehnelt assembly is first disassembled and all parts, which are to be reused, are carefully inspected and cleaned. The cathode is rebuilt with new pyrolytic graphite pads and a new LaB6 or CeBix® single crystal shaped to exacting specifications. The unit is then reassembled to the manufacturer’s original specifications. The cathode is then heated to operating temperature in vacuum to stabilize the heating characteristics and to determine necessary heating current. That information is then provided with the cathode. In the case of Wehnelt or grid cap assemblies, the cathode tip is properly aligned and spaced to the Wehnelt or grid cap, to manufacturer’s specifications.

 

• Prices subject to change without notice

• State and local taxes not included

• F.O.B. APTech shipping dock

• Net 30 day terms

CeBix

LaB6

Transition Metal

 Carbides

Refractory Metals

Standard

Top Hat

Guard Ring

Etched Tip

Cathode Guide

Application Guide

Rebuilding Services

Refractory Metals
 (Parts)

Source Types

Cathode Dimensions

Guides

Services & Parts

Cathodes

© 2015 Applied Physics Technologies, Inc.

1600 NE Miller St. McMinnville, OR 97128

503.434.5550

Follow Us!