CEBIX® INSTALLATION PROCEDURE

Installing a CeBix® cathode in a Self Biased or an Independently Biased System

If you have a Self Biased System and are installing a CeBix® cathode, you must:

 

1. Increase the distance between the tip of the crystal and the Wehnelt cap. For example, when installing a cathode in a JEOL JBX‐5DII Lithography system, the crystal truncation should be recessed from the front surface of the Wehnelt 3/5 one turn for LaB6, or 3/4 turn for CeBix®. Use a similar tip distance relationship when installing CeBix® in other LaB6 instruments.

 

-OR-

 

2. Increase the bias resistance by a factor of 2.

 

*In some cases you will need to perform a combination of #1 and #2

 

If you have an Independently Biased System and are installing a CeBix® cathode, simply operate it the same way as you would operate a LaB6 cathode. Do expect, however, the total emission current to be approximately half of that obtained when operating a LaB6 cathode.

 

 

 

If you have any questions on how to install your CeBix® cathode, please Contact Us!

 

Technical Information

© 2015 Applied Physics Technologies, Inc.

1600 NE Miller St. McMinnville, OR 97128

503.434.5550

Follow Us!